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Title
Japanese:共焦点顕微鏡を用いた微細金型の形状測定に関する研究 
English: 
Author
Japanese: 笹島和幸, 原　精一郎, 伊藤康平, 野地祥子.  
English: 笹島和幸, 原　精一郎, 伊藤康平, 野地祥子.  
Language Japanese 
Journal/Book name
Japanese:精密工学会秋季大会学術講演論文集 
English: 
Volume, Number, Page         pp. 355-355
Published date 2003 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
Japanese: 
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