Nanometer stepping drive of surface acoustic wave motor

Publication Information

Title

Japanese:
English:	Nanometer stepping drive of surface acoustic wave motor

Author

Japanese:	重松隆史, 黒澤実, 浅井勝彦.
English:	T. Shigematsu, M. K. Kurosawa, K. Asai.

Language

English

Journal/Book name

Japanese:
English:	IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Volume, Number, Page

Vol. 50 No. 4 pp. 376-385

Published date

Apr. 2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI