Sub-nanometer stepping drive of surface acoustic wave motor | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Sub-nanometer stepping drive of surface acoustic wave motor

Author

Japanese:	重松隆史, 黒澤実, 浅井勝彦.
English:	T. Shigematsu, M. K. Kurosawa, K. Asai.

Language

English

Journal/Book name

Japanese:
English:	Proc. of IEEE-NANO 2003

Volume, Number, Page

pp. 299-302

Published date

Aug. 2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

https://doi.org/10.1109/NANO.2003.1231777

©2007 Tokyo Institute of Technology All rights reserved.