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Title
Japanese:TaN ゲート電極のRIE特性 
English: 
Author
Japanese: 戸野谷純一, 大見俊一郎, 岩井洋.  
English: 戸野谷純一, 大見俊一郎, 岩井洋.  
Language Japanese 
Journal/Book name
Japanese:第50回応用物理学関係連合講演会 
English: 
Volume, Number, Page Vol. 2        pp. 935
Published date 2003 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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