Miniaturized  SAW motor with 100Mhz driving frequency

Publication Information

Title

Japanese:
English:	Miniaturized SAW motor with 100Mhz driving frequency

Author

Japanese:	重松隆史, 黒澤実.
English:	T. Shigematsu, M. K. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Proc. of 17th IEEE Int. Micro Electro Mechanical Systems Conf., MEMS 2004

Volume, Number, Page

pp. 482-485

Published date

Jan. 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: