Nanometer resolution 2-D in-plane SAW motor | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Nanometer resolution 2-D in-plane SAW motor

Author

Japanese:	重松隆史, 黒澤実.
English:	T. Shigematsu, M. K. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Proc. of 9th Int. Conf. on New Actuators 2004, Actuator 2004

Volume, Number, Page

pp. 140-143

Published date

June 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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