Two-dimensionally self-holding Deflector with SAW (Surface Acoustic Wave) Actuation

Publication Information

Title

Japanese:
English:	Two-dimensionally self-holding Deflector with SAW (Surface Acoustic Wave) Actuation

Author

Japanese:	井関隆之, 重松隆史, 奥村実紀雄, 菅原孝, 黒澤実.
English:	T. Iseki, T. Shigematsu, M. Okumura, T.Sugawara, M. K. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Proc. of IEEE/LEOS Int. Conf. on Optical MEMS and Their Application, OPTICAL MEMS 2004

Volume, Number, Page

pp. 62-63

Published date

Aug. 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: