Aluminum Doped Hydrogenated Microcrystalline Cubic Silicon Carbide Films Deposited by Hot Wire CVD

Publication Information

Title

Japanese:
English:	Aluminum Doped Hydrogenated Microcrystalline Cubic Silicon Carbide Films Deposited by Hot Wire CVD

Author

Japanese:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.
English:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	3rd International Conference on Hot-Wire CVD (Cat-CVD) Process

Volume, Number, Page

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: