Highly Conductive Hydrogenated Microcrystalline Cubic Silicon Carbide Films Deposited by Hot Wire CVD at a Low Substrate Temperature

Publication Information

Title

Japanese:
English:	Highly Conductive Hydrogenated Microcrystalline Cubic Silicon Carbide Films Deposited by Hot Wire CVD at a Low Substrate Temperature

Author

Japanese:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.
English:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	31st Photovoltaic Specialists Conference and Exhibition

Volume, Number, Page

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: