Hydrogenated Silicon Carbon Films Prepared by Hot Wire Chemical Vapor Deposition Using Monomethylsilane

Publication Information

Title

Japanese:
English:	Hydrogenated Silicon Carbon Films Prepared by Hot Wire Chemical Vapor Deposition Using Monomethylsilane

Author

Japanese:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.
English:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	3rd World Conference on Photovoltaic Energy Conversion

Volume, Number, Page

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: