Formation of Nano-oxide Regions in p<sup>2+</sup>-GaAs Epilayers by Localized Atomic Force Microscope Probe Oxidation for Fabrication of Nano-structure Devices

Publication Information

Title

Japanese:
English:	Formation of Nano-oxide Regions in p²⁺-GaAs Epilayers by Localized Atomic Force Microscope Probe Oxidation for Fabrication of Nano-structure Devices

Author

Japanese:	Yuichi Matsuzaki, Narihisa Ota, Akira Yamada, Adarsh Sandhu, Makoto Konagai.
English:	Yuichi Matsuzaki, Narihisa Ota, Akira Yamada, Adarsh Sandhu, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	J. Crystal Growth

Volume, Number, Page

Vol. 251 pp. 276-280

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: