In situ FTIR investigation of the effect of gas-phase reaction on the deposition of Pb(Zr,Ti)O3 films by MOCVD

Publication Information

Title

Japanese:
English:	In situ FTIR investigation of the effect of gas-phase reaction on the deposition of Pb(Zr,Ti)O3 films by MOCVD

Author

Japanese:	Gouji Asano, Tsukasa Satake, Kunio Ohtsuki, 舟窪浩.
English:	Gouji Asano, Tsukasa Satake, Kunio Ohtsuki, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 498 pp. 277-281

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI