Formation of Stoichiometric SrRuO3 Electrodes for PZT Capacitors by Pulsed-MOCVD

Publication Information

Title

Japanese:
English:	Formation of Stoichiometric SrRuO3 Electrodes for PZT Capacitors by Pulsed-MOCVD

Author

Japanese:	Jun Minamidate, Atsushi Nagai, Sukpil Kim, June-mo Koo, Sangmin Shin, Youngsoo Park, 舟窪浩.
English:	Jun Minamidate, Atsushi Nagai, Sukpil Kim, June-mo Koo, Sangmin Shin, Youngsoo Park, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Electrochem. Solid-State Lett.

Volume, Number, Page

Vol. 9 No. 10 C164-C166.

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: