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Publication Information
Title
Japanese:
English:
Optimization of a gas Jet-type Z-pinch discharge EUV light source
Author
Japanese:
Naoya Iizuka, Nozomu Kishi, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, Smruti R. Mohanty,
Masato Watanabe
, Akitoshi Okino, Eiki Hotta.
English:
Naoya Iizuka, Nozomu Kishi, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, Smruti R. Mohanty,
Masato Watanabe
, Akitoshi Okino, Eiki Hotta.
Language
English
Journal/Book name
Japanese:
English:
Proceedings of the 22nd ISDEIV
Volume, Number, Page
pp. 630-633
Published date
2006
Publisher
Japanese:
English:
Conference name
Japanese:
English:
22nd International Symposium on Discharges and Electrical Insulation in Vacuum
Conference site
Japanese:
English:
Matsue, Japan
DOI
https://doi.org/10.1109/DEIV.2006.357381
©2007
Tokyo Institute of Technology All rights reserved.