Low-Temperature Deposition of Highly Conductive n-Type Hydrogenated Nanocrystalline Cubic SiC Films for Solar Cell Applications

Publication Information

Title

Japanese:
English:	Low-Temperature Deposition of Highly Conductive n-Type Hydrogenated Nanocrystalline Cubic SiC Films for Solar Cell Applications

Author

Japanese:	Shinsuke Miyajima, Keisuke Haga, Akira Yamada, Makoto Konagai.
English:	Shinsuke Miyajima, Keisuke Haga, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 45 No. 16 pp. L432-L434

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI