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Title
Japanese:SOI基板を用いた歪緩和Si1-yCy膜の作製 
English: 
Author
Japanese: 村野仁彦, 石原英恵, 山田　明, 小長井　誠.  
English: 村野仁彦, 石原英恵, 山田　明, 小長井　誠.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 22p-ZE-7
Published date 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:第53回応用物理学関係連合講演会 
English: 
Conference site
Japanese: 
English: 

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