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Title
Japanese:水素化ナノ結晶SiC堆積におけるプラズマパワーの影響 
English: 
Author
Japanese: 澤村　誠, 宮島晋介, 山田　明, 小長井　誠.  
English: 澤村　誠, 宮島晋介, 山田　明, 小長井　誠.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 29a-X-9
Published date 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:第67回応用物理学関係連合講演会 
English: 
Conference site
Japanese: 
English: 

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