Low temperatue depostition of hydrogenated nanocrystalline cubic silicon carbide thin films by HWCVD and VHF-PECVD

Publication Information

Title

Japanese:
English:	Low temperatue depostition of hydrogenated nanocrystalline cubic silicon carbide thin films by HWCVD and VHF-PECVD

Author

Japanese:	Shinsuke Miyajim, Makoto Sawamura, Akira Yamada, Makoto Konagai.
English:	Shinsuke Miyajim, Makoto Sawamura, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. *

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	4th World Conference on Photovoltaic Energy Converstion

Conference site

Japanese:
English:	Hawaii, USA