Growth and Characterization of Germanium Carbon Films Deposited by VHF Plasma CVD Technique

Publication Information

Title

Japanese:
English:	Growth and Characterization of Germanium Carbon Films Deposited by VHF Plasma CVD Technique

Author

Japanese:	Yasutoshi Yashiki, Seiichi Kouketsu, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.
English:	Yasutoshi Yashiki, Seiichi Kouketsu, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. *

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	4th World Conference on Photovoltaic Energy Converstion

Conference site

Japanese:
English:	Hawaii, USA