Properties of Nanocrystalline 3C-SiC:H and SiC:Ge:H Films Deposited at Low Substrate Temperatures

Publication Information

Title

Japanese:
English:	Properties of Nanocrystalline 3C-SiC:H and SiC:Ge:H Films Deposited at Low Substrate Temperatures

Author

Japanese:	Shinsuke Miyajim, Akira Yamada, Makoto Kongai.
English:	Shinsuke Miyajim, Akira Yamada, Makoto Kongai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. *

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS spring meeting

Conference site

Japanese:
English:	San Francisco, USA