Low Temperature Deposition of nc-3C-SiC:H films by VHF-PECVD Under High Pressure and High Power Conditions

Publication Information

Title

Japanese:
English:	Low Temperature Deposition of nc-3C-SiC:H films by VHF-PECVD Under High Pressure and High Power Conditions

Author

Japanese:	宮島晋介, Makoto Sawamura, 山田明, 小長井誠.
English:	Shinsuke Miyajima, Makoto Sawamura, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of 2007 MRS spring meeting

Volume, Number, Page

pp. 10 (A5.1)

Published date

Apr. 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2007 MRS spring meeting, April 9-13 2007, Symposium A, SESSION A5 (Poster): Alloys A5.1

Conference site

Japanese:
English:	Moscone West San Francisco, CA, USA