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Title
Japanese:(110)面SiGe/SOI構造の酸化濃縮による(110)GOI基板の作製 
English: 
Author
Japanese: Sanjeewa Dissanayake, 熊谷寛, 菅原聡, 高木信一.  
English: Sanjeewa Dissanayake, 熊谷寛, 菅原聡, 高木信一.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 31p-ZG-15
Published date 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:第67回応用物理学会学術講演会, 草津, 
Conference site
Japanese: 
English: 

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