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Title
Japanese:Ge上薄膜Siのプラズマ酸化によるSiO2/Ge MISキャパシタの作製と電気特性 
English: 
Author
Japanese: 熊谷寛, 七条真人, 石川寛人, 星井拓也, 菅原聡, 高木信一.  
English: 熊谷寛, 七条真人, 石川寛人, 星井拓也, 菅原聡, 高木信一.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 8p-ZK-21
Published date 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese:第66回応用物理学会学術講演会, 徳島, 
English: 
Conference site
Japanese: 
English: 

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