Aluminum-doped hydrogenated microcrystalline cubic silicon carbide films deposited by hot wire CVD

Publication Information

Title

Japanese:
English:	Aluminum-doped hydrogenated microcrystalline cubic silicon carbide films deposited by hot wire CVD

Author

Japanese:	宮島晋介, 山田明, 小長井誠.
English:	Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 501 No. 1-2 pp. 186-189

Published date

Apr. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI