Publication Information

Title

Japanese:
English:	Surface Passivation of Crystalline and Polycrystalline Silicon Using Hydrogenated Amorphous Silicon Oxide Film

Author

Japanese:	ｽﾘﾀﾗﾃｲｸﾝｼﾞﾔﾗﾝ, BANERJEE CHANDAN, Michio Otsubo, 杉浦勉, 山本紘史, 佐藤剛彦, LIMMANEE AMORNRAT, 山田明, 小長井誠.
English:	Jaran Sritharathikhun, Chandan Banerjee, Michio Otsubo, Tsutomu Sugiura, Hiroshi Yamamoto, Takehiko Sato, Amornrat Limmanee, Akira Yamada, Makoto Konagai.

Language

Japanese

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 46 No. 6A pp. 3296-3300: (A01,A10)

Published date

June 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

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