EFFECT OF HYDROGEN DILUTION ON THE Si:H FILM GROWTH BY HOT WIRE CHEMICAL VAPOR DEPOSITION

Publication Information

Title

Japanese:
English:	EFFECT OF HYDROGEN DILUTION ON THE Si:H FILM GROWTH BY HOT WIRE CHEMICAL VAPOR DEPOSITION

Author

Japanese:	檜座秀一, 富田充朗, 山田明, 小長井誠.
English:	Shuichi Hiza, Mitsuaki Tomita, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	22nd European Photovoltaic Solar Energy Conference

Volume, Number, Page

pp. 2119-2122, 3AV.2.9

Published date

Sept. 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	22nd European Photovoltaic Solar Energy Conference

Conference site

Japanese:
English:	Milan, Italy