Influence of Plasma Power and Substrate Temperature on the Structure of Nanocrystalline Germanium Carbon Thin Films by VHF plasma CVD

Publication Information

Title

Japanese:
English:	Influence of Plasma Power and Substrate Temperature on the Structure of Nanocrystalline Germanium Carbon Thin Films by VHF plasma CVD

Author

Japanese:	屋敷保聡, Seiichi Kouketsu, 宮島晋介, 山田明, 小長井誠.
English:	Yasutoshi Yashiki, Seiichi Kouketsu, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	The 22nd International Conference on Amorphous and Nanocrystalline Semiconductors

Volume, Number, Page

Published date

Aug. 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 22nd International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS 22)

Conference site

Japanese:
English:	Colorado, USA