Effects of Nitrogen Addition on the Properties of a-SiCN:H Films Using Hexamethyldisilazane

Publication Information

Title

Japanese:
English:	Effects of Nitrogen Addition on the Properties of a-SiCN:H Films Using Hexamethyldisilazane

Author

Japanese:	LIMMANEE AMORNRAT, Michio Otsubo, 杉浦勉, 佐藤剛彦, 宮島晋介, 山田明, 小長井誠.
English:	Amornrat Limmanee, Michio Otsubo, Tsutomu Sugiura, Takehiko Sato, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	2007 Materials Research Society, Spring Meeting

Volume, Number, Page

Published date

Apr. 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2007 Materials Research Society, Spring Meeting

Conference site

Japanese:
English:	San Francisco, California

DOI