Delamination Behavior of Hard Film on Soft Substrate During Nano- and Micro- Indentation

Publication Information

Title

Japanese:
English:	Delamination Behavior of Hard Film on Soft Substrate During Nano- and Micro- Indentation

Author

Japanese:	上月謙太郎, 大宮正毅, 岸本喜久雄.
English:	Kentaro Kozuki, Masaki Omiya, Kikuo Kishimoto.

Language

English

Journal/Book name

Japanese:
English:	MicroNanoReliability 2007 Abstract

Volume, Number, Page

p. 133

Published date

Sept. 2007

Publisher

Japanese:
English:	MicroNanoReliability 2007 Abstract

Conference name

Japanese:
English:	MicroNanoReliability 2007 Abstract

Conference site

Japanese:
English:	Berlin, Germany