“In situ gas-phase FTIR monitoring of liquid delivery MOCVD process for PZT film preparation”

Publication Information

Title

Japanese:
English:	“In situ gas-phase FTIR monitoring of liquid delivery MOCVD process for PZT film preparation”

Author

Japanese:	舟窪浩, Gouji Asano, Kazuaki Tonari, Yukichi Takamatsu, Kunio Ohtsuki, Tsukasa Satake.
English:	Hiroshi Funakubo, Gouji Asano, Kazuaki Tonari, Yukichi Takamatsu, Kunio Ohtsuki, Tsukasa Satake.

Language

English

Journal/Book name

Japanese:
English:	Chemical Engineering Journal,

Volume, Number, Page

Vol. 135 pp. 10–14.

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: