同軸ノズル型電極を用いた放電プラズマからのEUV発光特性

Publication Information

Title

Japanese:	同軸ノズル型電極を用いた放電プラズマからのEUV発光特性
English:

Author

Japanese:	渡邊正人, 宋仁皓, 小林靖典, 坂本敏郎, S.R.Mohanty, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	MASATO WATANABE, INHO SONG, Yasunori Kobayashi, Toshiro Sakamoto, S.R.Mohanty, AKITOSHI OKINO, KAZUHIKO HORIOKA, EIKI HOTTA.

Language

Japanese

Journal/Book name

Japanese:	第66回応用物理学会学術講演会講演予稿集
English:

Volume, Number, Page

No. 2 pp. 582

Published date

Sept. 2005

Publisher

Japanese:
English:

Conference name

Japanese:	応用物理学会秋季講演会
English:

Conference site

Japanese:	日本
English: