High speed and quick response precise linear stage system using V-shape transducer ultrasonic motors

Publication Information

Title

Japanese:
English:	High speed and quick response precise linear stage system using V-shape transducer ultrasonic motors

Author

Japanese:	阿隅一将, 藤村健, 黒澤実.
English:	K. Asumi, T. Fujimura, M. K. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Proc.of 10th Anniversary Int. Conf. of the European Soc. for Prec. Eng. and Nanotechnology, EUSPEN 08

Volume, Number, Page

Vol. 1 pp. 406-410

Published date

May 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Zurich, Switzerland