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Title
Japanese:シリコン・スピンエレクトロニクス ～材料・デバイス・回路～ 
English: 
Author
Japanese: 菅原聡.  
English: SATOSHI SUGAHARA.  
Language Japanese 
Journal/Book name
Japanese:日本半導体製造装置協会(SEAJ)講演会 
English: 
Volume, Number, Page         Invited paper
Published date Sept. 2007 
Publisher
Japanese: 
English: 
Conference name
Japanese:日本半導体製造装置協会(SEAJ)講演会 
English: 
Conference site
Japanese: 
English: 

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