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Title
Japanese:チタニア添加亜鉛フェライト・エピタキシャル薄膜の酸化窒素センサへの適用可能性 
English:Potential NOx sensor utilizing titania doped ferrite epitaxial thin ﾞlm 
Author
Japanese: 篠崎和夫, 稲葉悠介, 原 亨, 脇谷尚樹, クロス ジェフリー, 櫻井 修.  
English: K. Shinozaki, Y. Inaba, T. Hara, N. Wakiya, J.S. Cross, O. Sakurai.  
Language Japanese 
Journal/Book name
Japanese:第22回日本セラミックス協会 秋季シンポジウム講演予稿集 
English:22nd Fall Meeting of The Ceramic Society of Japan 
Volume, Number, Page     No. 3Q08    pp. 390
Published date Sept. 2009 
Publisher
Japanese: 
English: 
Conference name
Japanese:第22回日本セラミックス協会 秋季シンポジウム 
English:22nd Fall Meeting of The Ceramic Society of Japan 
Conference site
Japanese:愛媛大学，愛媛 
English: 
Abstract In order to improve NOx gas sensors' sensitivity, we have prepared TiO2 doped ZnFe2O4 (ZFTO) epitaxial thin films with different thicknesses on Yttria stabilized-ZrO2,YSZ(100) substrate by pulsed laser deposition. Pt interdigital electrodes were deposited on the films by DC sputtering. The resistance of the films was measured during NO2 gas adsorption-desorption cycles. As a result, ZFTO films exhibited the highest sens tivity (燃/Rair) when the operating temperature was approximately 200oC and thickness of 50nm.

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