Displacement of micromirror composed of large-deflection spiral beams

Publication Information

Title

Japanese:
English:	Displacement of micromirror composed of large-deflection spiral beams

Author

Japanese:	堀江三喜男, 神谷大揮, ｻﾀﾞﾄｾｲﾄﾞﾎｾｲﾝ.
English:	MIKIO HORIE, DAIKI KAMIYA, Seid Hossein Sadat.

Language

English

Journal/Book name

Japanese:
English:	Proceeding of ISOT09(CD-ROM)

Volume, Number, Page

Published date

Sept. 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISOT2009

Conference site

Japanese:
English:	Istanbul