Development of Large Deflection Spiral Shaped Micromirror Actuator for Optical Switches | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Development of Large Deflection Spiral Shaped Micromirror Actuator for Optical Switches

Author

Japanese:	堀江三喜男.
English:	MIKIO HORIE.

Language

English

Journal/Book name

Japanese:
English:	Proceeding of ASPEN2009

Volume, Number, Page

Published date

Nov. 2009

Publisher

Japanese:
English:	JSPE

Conference name

Japanese:
English:	ASPEN2009

Conference site

Japanese:
English:	Kita-Kyusyu

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