A Study on the Preparation of Ionically Conductive Thin Films Utilizing Low Temperature Plasma Processes | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	A Study on the Preparation of Ionically Conductive Thin Films Utilizing Low Temperature Plasma Processes

Author

Japanese:	内本喜晴.
English:	Yoshiharu Uchimoto.

Type

Type:	Thesis (Ph.D.)
Country:

Language

Organization name

京都大学

Report number

Conferred date

1991/--/--

Judge

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