Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:	酸素プラズマ照射による酸化チタン前駆体薄膜の低温結晶化
English:

Author

Japanese:	有光直樹.
English:	Naoki Arimitsu.

Type

Type:	Thesis (Master)
Country:

Language

Organization name

Tokyo Institute of Technology

Report number

Conferred date

2006/03/--

Judge

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