Selection of Rare Earth Silicate with SrO Capping for EOT Scaling below o.5 nm | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Selection of Rare Earth Silicate with SrO Capping for EOT Scaling below o.5 nm

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

p. 403

Published date

Sept. 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ESSDERC 2009, 39th European Solid-State Device Research Conference

Conference site

Japanese:
English:	Athens, Greece

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