1604 磁気センサを用いたLSIめっき電流分布の無侵襲推定手法(OS16.逆問題解析手法の開発と最新応用(1))

Publication Information

Title

Japanese:	1604 磁気センサを用いたLSIめっき電流分布の無侵襲推定手法(OS16.逆問題解析手法の開発と最新応用(1))
English:	1604 Non destructive measurement of LSI electroplating rate using magnetic sensor

Author

Japanese:	天谷賢治.
English:	KENJI AMAYA.

Language

Japanese

Journal/Book name

Japanese:	計算力学講演会講演論文集
English:	The Computational Mechanics Conference

Volume, Number, Page

Vol. 2007 No. 20 pp. 447-448

Published date

2007

Publisher

Japanese:	社団法人日本機械学会
English:	The Japan Society of Mechanical Engineers

Conference name

Japanese:
English:

Conference site

Japanese:	1348026X
English:

Official URL