Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:	くし歯アクチュエータを用いた高速MEMSスイッチングミラーの作製と評価
English:

Author

Japanese:	和田裕之.
English:	Hiroyuki Wada.

Type

Type:	Thesis (Ph.D.)
Country:	Japan

Language

Japanese

Organization name

Tokyo Institute of Technology

Report number

乙第3656号

Conferred date

2003/03/31

Judge

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