Home >

news Help

Publication Information


Title
Japanese: 
English:SrO capping effect for La2O3/ Ce-Silicate gate dielectrics 
Author
Japanese: 角嶋邦之, 岡本晃一, 小柳友常, 幸田みゆき, 舘喜一, 川那子高暢, 宋在烈, パールハットアヘメト, 野平博司, 筒井一生, 杉井信之, 服部健雄, 岩井洋.  
English: Kuniyuki KAKUSHIMA, Koichi Okamoto, Tomotsune Koyanagi, Miyuki Kouda, Kiichi Tachi, Takamasa Kawanago, Jaeyeol Song, Ahmet Parhat, Hiroshi Nohira, KAZUO TSUTSUI, Nobuyuki Sugii, takeo hattori, HIROSHI IWAI.  
Language English 
Journal/Book name
Japanese: 
English:Microelectronics Reliability 50 
Volume, Number, Page         pp. 356-359
Published date Mar. 2010 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

©2007 Tokyo Institute of Technology All rights reserved.