High Voltage Charge Pump Circuit in 0.18μm CMOS Process for MEMS Electrostatic Actuators Controlling

Publication Information

Title

Japanese:
English:	High Voltage Charge Pump Circuit in 0.18μm CMOS Process for MEMS Electrostatic Actuators Controlling

Author

Japanese:	白根篤史, 天川修平, 石原昇, 益一哉.
English:	Atsushi Shirane, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Integrated Circuits and Devices in Vietnam (ICDV) 2010

Volume, Number, Page

pp. 17-19

Published date

Aug. 2010

Publisher

Japanese:
English:	Integrated Circuits and Devices in Vietnam (ICDV) 2010

Conference name

Japanese:
English:	Integrated Circuits and Devices in Vietnam (ICDV) 2010

Conference site

Japanese:
English:	Ho Chi Minh City, Vietnam