Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe

Publication Information

Title

Japanese:
English:	Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe

Author

Japanese:	齋藤滋規, Masaki Sonoda.
English:	Shigeki Saito, Masaki Sonoda.

Language

English

Journal/Book name

Japanese:
English:	Journal of Micromechanics and Microengineering

Volume, Number, Page

Vol. 18 pp. 107001(1-3)

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI