Aluminum Doped Hydrogenated Nanocrystalline Cubic Silicon Carbide Films Deposited by VHF-PECVD for p-type Window Layer of Silicon Based Thin-Film Solar Cells

Publication Information

Title

Japanese:
English:	Aluminum Doped Hydrogenated Nanocrystalline Cubic Silicon Carbide Films Deposited by VHF-PECVD for p-type Window Layer of Silicon Based Thin-Film Solar Cells

Author

Japanese:	浜下大輔, 宮島晋介, 山田明, 小長井誠.
English:	Daisuke Hamashita, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:	35th IEEE Photovoltaic Specialist Conference

Conference site

Japanese:
English:	Hawaii, 2010. June 20-25