A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS

Publication Information

Title

Japanese:
English:	A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS

Author

Japanese:	小西敏文, 町田克之, 石原昇, 益一哉, 町田克之, 石原昇, 益一哉, Hiroyuki Fujita, Hiroshi Toshiyoshi.
English:	Toshifumi Konishi, Satoshi Maruyama, Takaaki Matsushima, Makoto Mita, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, Hiroshi Toshiyoshi.

Language

English

Journal/Book name

Japanese:
English:	Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials

Volume, Number, Page

pp. 1158-1159

Published date

Sept. 2010

Publisher

Japanese:
English:	2010 International Conference on Solid State Devices and Materials

Conference name

Japanese:
English:	2010 International Conference on Solid State Devices and Materials

Conference site

Japanese:
English:	Tokyo, Japan