Precise  Position Control of Coarse/Fine Dual Stage using Pneumatic  Actuators

Publication Information

Title

Japanese:
English:	Precise Position Control of Coarse/Fine Dual Stage using Pneumatic Actuators

Author

Japanese:	只野耕太郎, 新井豪, 川嶋健嗣, 藤田壽憲, 香川利春.
English:	Kotaro Tadano, Takeshi Arai, Kenji Kawashima, Toshinori Fujita, Toshiharu Kagawa.

Language

English

Journal/Book name

Japanese:
English:	World Automation Congress 2010

Volume, Number, Page

Published date

Sept. 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: