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Title
Japanese: 
English:Selection of rare earth silicates for highly scaled gate dielectrics 
Author
Japanese: 角嶋邦之, 岡本晃一, 小柳友常, 幸田みゆき, 舘喜一, 川那子高暢, 宋在烈, パールハットアヘメト, 筒井一生, 杉井信之, 服部健雄, 岩井洋.  
English: Kuniyuki KAKUSHIMA, Koichi Okamoto, Tomotsune Koyanagi, Miyuki Kouda, Kiichi Tachi, Takamasa Kawanago, Jaeyeol Song, Ahmet Parhat, KAZUO TSUTSUI, Nobuyuki Sugii, takeo hattori, HIROSHI IWAI.  
Language English 
Journal/Book name
Japanese: 
English:Microelectronic Engineering 
Volume, Number, Page Vol. 87    No. 10    pp. 1868-1871
Published date Oct. 2010 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1016/j.mee.2009.11.001

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