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Title
Japanese: 
English:Scaling of EOT Beyond 0.5nm 
Author
Japanese: パールハットアヘメト, 来山大祐, 金田 翼, 鈴木 拓也, 小柳友常, 幸田みゆき, M. Mamatrishat, 川那子高暢, 角嶋邦之, 岩井洋.  
English: Ahmet Parhat, 来山大祐, 金田 翼, 鈴木 拓也, Tomotsune Koyanagi, Miyuki Kouda, M. Mamatrishat, Takamasa Kawanago, Kuniyuki KAKUSHIMA, HIROSHI IWAI.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Nov. 2010 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:ICSICT(International Conference on Solid-State and Integrated Circuit Technology)2010 
Conference site
Japanese: 
English:Shanghai, China 

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