Analysis and applications of nanostructures created by stencil lithography

Publication Information

Title

Japanese:	Analysis and applications of nanostructures created by stencil lithography
English:	Analysis and applications of nanostructures created by stencil lithography

Author

Japanese:	O. VAZQUEZ-MENA, 三宮工, M. TOSUN, G. VILLANUEVA, J. VOROS, J. BRUGGER.
English:	O. VAZQUEZ-MENA, Takumi Sannomiya, M. TOSUN, G. VILLANUEVA, J. VOROS, J. BRUGGER.

Language

English

Journal/Book name

Japanese:	15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009
English:	15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009

Volume, Number, Page

pp. 465-8

Published date

2009

Publisher

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English:

Conference name

Japanese:
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Conference site

Japanese:
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DOI